I like both
Mary and
Maria, and both are family names. When naming our first daughter, we wanted to use our late mothers' names as mns: my mother had only one given name, and DH's mother (an Afrikaans woman) was
Bertha Maria. We eliminated
Bertha and decided that
Mary would work better with the other names than
Maria, so we used it successfully.
I like Maia/Maya, but I'm a bit conflicted: I prefer
Maya but it's so South American that I think I'd use
Maia instead, if I had enough daughters.